Etching the Oxide Barrier of Micrometer-Scale Self-Organized Porous Anodic Alumina Membranes
نویسندگان
چکیده
منابع مشابه
Penetrating the oxide barrier in situ and separating freestanding porous anodic alumina films in one step.
A simple method for penetrating the barrier layer of an anodic aluminum oxide (AAO) film and for detaching the AAO film from residual Al foil was developed by reversing the bias voltage in situ after the anodization process is completed. With this technique, we have been able to obtain large pieces of free-standing AAO membranes with regular pore sizes of sub-10 nm. By combining Ar ion milling ...
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We report on Si nanopatterning through an on-chip self-assembled porous anodic alumina (PAA) masking layer using reactive ion etching based on fluorine chemistry. Three different gases/gas mixtures were investigated: pure SF6, SF6/O2, and SF6/CHF3. For the first time, a systematic investigation of the etch rate and process anisotropy was performed. It was found that in all cases, the etch rate ...
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Wet-chemical etching of the barrier oxide layer of anodic aluminum oxide (AAO) was systematically investigated by using scanning electron microscopy (SEM), secondary ion mass spectrometry (SIMS), and a newly devised experimental setup that allows accurate in situ determination of the pore opening point during chemical etching of the barrier oxide layer. We found that opening of the barrier oxid...
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With the aim of developing a process for surface enlargement on an electrode for measuring brain activity attempts have been made to fabricate a porous anodic alumina membrane directly on the electrode. The porous membrane was intended to be used as scaffold for deposition of an electrically conducting polymer on the electrode surface. A silicon wafer with gold electrodes was the base onto whic...
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Penetration of a nanochannel mask by 190keV Co + ions is tested for the purpose of achieving laterally modulated ion implantation into a SiO2 thin film on a Si substrate. A 2Dnanoporous membrane of anodic aluminum oxide (AAO) is chosen as the mask. Criteria and challenges for designing the mask are presented. Implantation experiments through a mask with pore diameter of 125 nm and inter-pore di...
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ژورنال
عنوان ژورنال: Journal of The Electrochemical Society
سال: 2015
ISSN: 0013-4651,1945-7111
DOI: 10.1149/2.0791504jes